Definition/Meaning of TDMAGe

• English - Abbreviation: TDMGe Tetrakis-Dimethylamino-Germane, the metalorganic source for Germanium Nitride (GeN) in MOCVD of semiconductors . It grows GeN instead of Ge , and is used at either high temperatures (600-800 C) or with plasma because of its very low vapor pressure and higher decomposition temperature . Also known as TDMAGe and pronounced as T-Damage.